However, either because of their limited availability to the scientific community or their restriction to expert users only, we have extended the software CASINO ( Drouin and others, 2007) to 3D Monte Carlo simulation. Various softwares and code systems were developed to fill this need of a 3D Monte Carlo software ( Babin and others, 2006 Ding and Li, 2005 Gauvin and Michaud, 2009 Gnieser and others, 2008 Johnsen and others, 2010 Kieft and Bosch, 2008 Ritchie, 2005 Salvat and others, 2006 Villarrubia and Ding, 2009 Villarrubia and others, 2007 Yan and others, 1998). To apply the Monte Carlo method to more realistic applications with complex sample, three-dimensional (3D) Monte Carlo softwares are needed. For various reasons, but principally because of the long simulation time and large computer memory needed, the previous version of CASINO was limited to simple geometry ( Drouin and others, 2007). Monte Carlo software was used to understand the capabilities of electron microscopes at higher energy (> 10 keV) ( Newbury and Yakowitz, 1976) or at lower energy (< 5 keV) ( Hovington and others, 1997). The Monte Carlo method is useful to help understand these instruments ( Joy, 1995b). To fully understand and extract all the information available from these instruments, the complex electron-matter interactions have to be understood.

They can even be used to manufacture integrated circuits by electron beam lithography. Electron microscopes are useful instruments used to observe and characterize various types of samples: observation of complex integrated circuits, small nanoparticles in biological samples or nano-precipitates, and dislocations by cathodoluminescence just to name a few examples.

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